For Your
AMHS/OHT Transfer System

We offer semiconductor manufacturing
automation solutions

From Automation Tool to Smart Fab

About Us

Evolutional Automation

Based in Silicon Valley, California, Wonder Automation offers semiconductor fab’s automated material handling system (AMHS) and overhead hoist transport (OHT), high-performance wafer transfer and inspection equipment, clean room robots and peripherals. Since the Group’s inception in 2010, it has provided automation services to the world's top semiconductor manufacturers and equipment manufacturers for more than a decade.

Wonder Automation brings a group of >20 years’ related automation equipment and software professionals to address this market.

For AMHS, our goal is to become the world’s most cost-effective AMHS automation supplier, helping customers minimize automation costs and risks to step up to smart manufacturing. Our versatile OHT configuration is designed for front-end, back-end, new and old fab.

For wafer handling, Wonder Automation’ expertise lies in handling fragile and special wafers, all components are made in house for easy configuration to meet client’s needs.

Wafer Transfer/Packs

Multi size, multi carrier
and multi wafer types

We keep the design of sorter/ EFEM (Equipment Front End Module) as simple as possible by standardizing the module for all jobs.

  • Specializes in fragile wafer transfer: ultra-thin, Taiko, ultra-thick, warped, through-hole and compound wafers (e.g. SiC)
  • One machine can transfer 6"~12" multi-size and multi-type wafers
  • Can mix and match FOUP, SMIF and cassette
  • Options: flip, high precision, non-contact, Bernoulli thin wafer transfer
  • Exclusive proprietary robots, smart grippers and wafer aligners that can be customized to meet specific customer needs (Details)

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Clean room robot

4-axis robot, flexible and space-saving, with 5th-axis flipper, exclusive simulation engine, can replace existing robot without changing system level code.”

Edge Grip End Effector

For 4"-12" , 250 ~ 1200 μm wafers, with sensor-controlled “SoftTouch" mechanism, the clamping force is controllable and constant. Ensure the stability and safety of wafer handling, and avoid particle contamination. (Details)

Vortex & Edge Gripper

Bernoulli type with "SoftTouch" edge grippers can handle 4"-12" , 50~1200μm ultra-thin, Taiko, ultra-thick, warped and fragile wafers, safely pick and placed from wafer top (top pick/ place). (Details)

Edge Grip Wafer Aligner

For 6/8/12" , 50~1200μm wafers, the wafer edge clamping and centering device can achieve controllable and constant clamping force with its "SoftTouch" , also featuring ± 25μm/0.02°high precision and low particle contamination. (Details)

Watch video

Product Introduction Video

Wafer Inspect

2D/3D Wafer Inspection

Micro Inspection can be an easy task with our 2D/3D wafer inspection system, quality control personnel can easily check wafer quality from a remote monitor.

  • Auto loading/binning wafer
  • Multi size exam (6”~12”)
  • Recipe driven or manual operation
  • Defect Wafer Map
  • Optional macro visual inspection and microscope tilting

AMHS / OHT

Automatic Material Handling System

With a team of average 15 years of experience in semiconductor fab AMHS, we expect to bring higher operational efficiency to your fab.

  • High applicability - new / old fab renovation, low ceiling
  • Dual Y-axis design, enhanced lateral transfer, enhanced stability
  • ± 180 °swivel gripper, ideal for picking and placing misaligned equipment in old fabs
  • High versatility - 6”/8”/12” , FOUP, SMIF, magazine compatible
  • In-house developed HID non-contact power supply system
  • Intelligent scheduling/path planning with simulation for proof of concept
  • Stocker / N2 OHB/AGV

Intelligent Manufacturing

Shall Not Be A Slogan